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Double-sided microscope Product List

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Bilateral Microscope System "TOMOS-80XY"

Bilateral Microscope System "TOMOS-80XY"

Equipped with an 8-inch electric XY stage and autofocus function! Precisely controls movement to prevent measurement errors.

The "TOMOS-80XY" is a dual-sided microscope system that automatically moves to the specified measurement points of a workpiece and can automatically measure the misalignment of patterns and alignment marks on the front and back of MEMS and semiconductor wafers. It automatically detects the edges of alignment marks such as circles, squares, and crosses, and measures the misalignment between their center coordinates. It registers XYZ stage control conditions, measurement conditions, creates maps, and automatically measures multiple locations on the workpiece. Additionally, it is equipped with an alignment function to correct the misalignment of the XY stage and the workpiece mounting position, ensuring precise movement control and preventing measurement errors. [Software Features (Excerpt)] - Front and back optical axis correction - Front and back lens magnification correction - Camera mounting angle correction - Automatic measurement of front and back position misalignment - Electric stage control and map movement control *For more details, please download the PDF or feel free to contact us.

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  • Double-sided microscope

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Exhibiting cutting-edge optical equipment such as dual-sided measurement microscopes for semiconductors and FA, as well as high-speed autofocus.

Exhibiting cutting-edge optical equipment such as dual-sided measurement microscopes for semiconductors and FA, as well as high-speed autofocus.

Ipros AI Expo Exhibition: The in-house developed microscope manufacturer 'Frobel' solves inspection and manufacturing challenges with dual-sided measurement, near-infrared, and high-speed autofocus!

We are Flowbell Co., Ltd., a specialized manufacturer of optical equipment. We would like to introduce three cutting-edge products that contribute to the automation and high precision of inspection and manufacturing lines, which will be exhibited at the "Ipros AI Expo." 【Exhibited Product Lineup】 ■ Double-Sided Microscope System TOMOS-50 A self-developed microscope for semiconductors. It simultaneously measures the "both sides" of the object with high precision using our unique optical technology. ■ High-Sensitivity Near-Infrared Camera FS-1700IRP Clearly visualizes defects and internal structures that are invisible to visible light. It is ideal for advanced appearance inspections. ■ High-Speed Autofocus Unit Mimic II-AF/CL Eliminates individual differences in visual inspections and supports the automation of devices. It can be installed in a wide range of fields, including industrial FA, semiconductors, and medical applications. Are you struggling with variations in manual inspections or invisible fine defects? At the exhibition, we will provide detailed information on the capabilities and use cases of these products. If you would like to discuss incorporating them into your own equipment or would like to see materials first, please feel free to contact us or visit our booth!

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  • Optical microscope
  • Other appearance and image inspection equipment
  • Electron microscope
  • Double-sided microscope

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Bilateral Microscope System "TOMOS-50"

Bilateral Microscope System "TOMOS-50"

Introducing the front and back misalignment / dimensional measurement microscope. Achieved high precision at a low cost.

The "TOMOS-50" is a compact type of measurement system that can simultaneously capture the front and back of electronic components such as crystal oscillators, MEMS, and semiconductors, and measure with an accuracy of ±0.2μm or less. The front and back optical axis correction can be precisely adjusted using a micro stage and software. Additionally, it is also available for sale as a dual-sided microscope module for device integration. Please contact us for more information. 【Features】 ■ Compact type ■ Approximately 3 million pixels ■ Simultaneous capture of both sides, dimensional measurement, and position deviation measurement ■ High-precision correction of the front and back optical axis using a micro stage and software ■ Measurement of position deviation between front and back with a repeatability of ±0.2μm or less (varies depending on conditions) *For more details, please refer to the PDF document or feel free to contact us.

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Bilateral Microscope System "TOMOS-60XY"

Bilateral Microscope System "TOMOS-60XY"

Equipped with XY electric stage and autofocus function! Customization for software and more is also supported.

The "TOMOS-60XY" is a 6-inch electric XY stage dual-sided microscope system that can automatically measure multiple locations on a workpiece. It can automatically move to the specified measurement locations on the workpiece and measure the displacement of patterns and alignment marks on the front and back of quartz oscillators, MEMS, semiconductor wafers, and electronic components. Additionally, it is equipped with an alignment function for correcting the positional deviation between the XY stage and the workpiece, ensuring precise movement control and preventing measurement errors. 【Features】 ■ Automatically detects the edges of alignment marks such as circles, squares, and crosses, and measures the displacement between their center coordinates. ■ Controls XYZ stage conditions, measurement conditions, creates maps, and registers recipes to automatically measure multiple locations on the workpiece. *For more details, please download the PDF or feel free to contact us.

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  • Electron microscope
  • Double-sided microscope

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Frobel Corporation Industrial Products Digest Catalog

Frobel Corporation Industrial Products Digest Catalog

Introducing autofocus units, near-infrared cameras, and microscope camera systems.

This catalog features dual-sided microscope systems, micro line width measurement systems, and microscope camera systems. We introduce the easy-to-use, low-cost micro line width measurement system "VP-5LW," the high-resolution 3CMOS camera system "FR-960M" with excellent color reproduction, and the bright and beautifully colored color camera system for stereo microscopes "FR-400Z." It serves as a useful reference when considering implementation. 【Featured Products (Partial)】 ■ Dual-sided microscope system 4-inch/6-inch "TOMOS-50/TOMOS-60" ■ 6-inch electric XY stage dual-sided microscope system "TOMOS-60XY" ■ High-speed autofocus unit "MimicII-AF/CL" ■ High-sensitivity near-infrared camera "FS-1700IRP" ■ Color camera system for microscopes "FR-400C" *For more details, please download the PDF or feel free to contact us.

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  • Other measurement, recording and measuring instruments
  • Double-sided microscope

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Bilateral Microscope System "TOMOS Series"

Bilateral Microscope System "TOMOS Series"

Correcting the optical axis shift of the microscope's front and back, variations in the objective lens magnification, and the camera's θ shift with images!

We would like to introduce our dual-sided microscope system, the "TOMOS series." Our lineup includes the "TOMOS-50" with a 4-inch stage, the "TOMOS-60" with a 6-inch stage, and the "TOMOS-50R1" with wide-field ring illumination. It captures both sides of quartz oscillators, MEMS, and electronic components simultaneously. Dimension measurements can be performed without the hassle of flipping the sample over. 【Features of TOMOS-50/60】 ■ Simultaneous imaging of both sides of quartz oscillators, MEMS, semiconductor wafers, and electronic components ■ Measurement of alignment marks and pattern shifts on both sides with repeatable accuracy of ±0.3μm ■ High-precision image processing correction for optical axis misalignment, lens magnification errors, and camera θ shifts ■ Supports autofocus function and electric XY stage (optional) *For more details, please download the PDF or feel free to contact us.

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  • Other microscopes
  • Optical microscope
  • Electron microscope
  • Double-sided microscope

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Dual-Sided Microscope System for Semiconductors 'TOMOS-50'

Dual-Sided Microscope System for Semiconductors 'TOMOS-50'

Supports foreign matter inspection in semiconductor manufacturing. Achieves high-precision measurement.

In the semiconductor industry, detecting foreign matter during the manufacturing process is crucial to ensure product quality. Foreign substances can lead to a decline in product performance and the occurrence of defective products. The dual-sided microscope system 'TOMOS-50' enables simultaneous imaging of both sides of semiconductor components, allowing for the detection of foreign matter with an accuracy of ±0.2μm or less. This enhances quality control in the manufacturing process and contributes to improved yield. 【Application Scenarios】 - Foreign matter inspection of semiconductor wafers - Foreign matter inspection of electronic components - Foreign matter inspection of MEMS devices 【Benefits of Implementation】 - Reduction of defective products due to foreign matter contamination - Increased efficiency in quality control - Improvement in product reliability

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